Reference number
ISO 14644-12:2018
International Standard
ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Edition 1
2018-08
Preview
ISO 14644-12:2018
69432
Indisponible en français
Publiée (Edition 1, 2018)

ISO 14644-12:2018

ISO 14644-12:2018
69432
Langue
Format
CHF 63
Convertir les francs suisses (CHF) dans une autre devise

Résumé

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.

Informations générales

  •  : Publiée
     : 2018-08
    : Clôture de l'examen [90.60]
  •  : 1
  • ISO/TC 209
    13.040.35 
  • RSS mises à jour

Vous avez une question?

Consulter notre Aide et assistance