ISO/CD 4508
Surface chemical analysis--Scanning probe microscopy--Guidelines for the method and procedure for determining the effect of temperature on AFM nano-scale dimension measurements
Reference number
ISO/CD 4508
Edition 1
© ISO 2024
Committee Draft
Under development
A draft is being reviewed by the committee.

Abstract

This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).

General information

  • Status
     : Under development
    Stage
    : CD consultation initiated [30.20]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 201/SC 9
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

  2. Store
  3. Standards catalogue
  4. TC
  5. ISO/TC 201/SC 9
  6. ISO/CD 4508