Abstract
PreviewThis document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
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Status: PublishedPublication date: 2021-05
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Edition: 1Number of pages: 7
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- ICS :
- 25.220.99 Other treatments and coatings
Buy this standard
| Format | Language | |
|---|---|---|
| std 1 61 | PDF + ePub | |
| std 2 61 | Paper |
- CHF61
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