Reference number
ISO 13084:2018
International Standard
ISO 13084:2018
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Edition 2
2018-11
Read sample
ISO 13084:2018
73133
Published (Edition 2, 2018)
This publication was last reviewed and confirmed in 2024. Therefore this version remains current.

ISO 13084:2018

ISO 13084:2018
73133
Language
Format
CHF 96
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Abstract

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

General information

  •  : Published
     : 2018-11
    : International Standard to be revised [90.92]
  •  : 2
     : 15
  • ISO/TC 201/SC 6
    71.040.40 
  • RSS updates

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