Abstract
This document specifies the evaluation standard of the composition, structure and properties of multi-layer hard coatings by common physical vapor deposition (PVD), indicating a vacuum deposition method that produces a material source by evaporation, sputtering or related non-chemical ways.
General information
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Status: PublishedPublication date: 2019-10Stage: International Standard under systematic review [90.20]
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Edition: 1Number of pages: 9
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Technical Committee :ISO/TC 107/SC 9ICS :25.220.40
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