ISO 18114:2003
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Reference number
ISO 18114:2003
Edition 1
2003-04
© ISO 2024
Withdrawn
Withdrawn (Edition 1, 2003)

Abstract

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

General information

  • Status
     : Withdrawn
    Publication date
     : 2003-04
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 4
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
  • RSS updates

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