Reference number
ISO 14644-12:2018
International Standard
ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Edition 1
2018-08
Read sample
ISO 14644-12:2018
69432
Published (Edition 1, 2018)

ISO 14644-12:2018

ISO 14644-12:2018
69432
Language
Format
CHF 63
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Abstract

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.

General information

  •  : Published
     : 2018-08
    : Close of review [90.60]
  •  : 1
     : 11
  • ISO/TC 209
    13.040.35 
  • RSS updates

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