Resumen
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2022-04Etapa: Norma Internacional publicada [60.60]
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Edición: 1Número de páginas: 15
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Comité Técnico :ISO/TC 201/SC 6ICS :71.040.40
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